STM probe

STM probe (1), in particular for use in an SEM for examining a surface of a sample (28) by STM and/or SEM operation, comprising:

• a sectored outer piezotube (2),
• an inner piezotube (3) arranged concentrically in the outer piezotube (2),
• the two piezotubes (2, 3) having substantially the same tube length,
• an object carrier plate (24) fixed to one annular front face (23) of the inner piezotube (3), for carrying the sample (28),
• a head plate (30) substantially in the form of an equilateral triangle,
• the head plate (30) being mounted on the annular front face (29) of the outer piezotube (2) adjacent to the object carrier plate (24), and axially covering more than half of the circumference of this annular front face (29),
• a triangle side (31) of the head plate (30) crossing the tubes (2, 3) comprising a recess (34) substantially concentrical with the tubes (2, 3), the object carrier plate (24) being arranged in this recess (34) with play on all sides, a test-prod attachment plate (40) substantially in the form of an equilateral triangle,
• the test-prod attachment plate (40) being arranged above the head plate (30) and overlapping the latter,
• with associated pairs of the triangle sides of the head plate (30) and test-prod attachment plate (40) paralleling each other,
• with a triangle side (42) of the test-prod attachment plate (40) extending above the object carrier plate (24) comprising a recess (41) and, within recess (41), a test-prod attachment (45) made of an insulating material for receiving a test prod (46) extending substantially in the tube axis,
• the two corner areas of the test-prod attachment plate (40) adjacent to the recess (41) each being provided with a fine-thread spindle (47, 48) screwed through the test-prod attachment plate (40), one end of each said spindle (47, 48) bearing on the smooth face of the head plate (30) opposing the respective spindle end,
• the corner area of the head plate (30) facing away from the recess (34) is provided with a third fine-thread spindle (37) screwed through the head plate (30), one end of said third spindle (37) bearing on the smooth face of the test-prod attachment plate (40) opposing the spindle end, and
• the two plates (30, 40) being held together by three springs (56) engaging the corners of the plates (30, 40).