Sputtering target
AssigneeMinnesota Mining and Manufacturing Company
InventorsKathleen M. Humpal, James P. Mathers, Michael B. Hintz
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Abstract
Electrically conductive sputtering target comprising yttria and amorphous carbon, a method of making the same, and a method of using the same.
Claims23
An electrically conductive sputtering target comprising (a) at least 35 volume percent yttria, based on the total volume of the target, present as a porous structure having a series of interconnecting channels, and (b) a substantially continuous amorphous carbon coating on internal surfaces of said porous structure such that said target is electrically conductive.
A method of preparing an electrically conductive sputtering target, the method comprising the steps of:
- a) providing a green body comprising a sufficient amount of organic binder and a sufficient amount of yttria particles to provide after steps (b) and (c) an electrically conductive sputtering target comprising amorphous carbon and at least 35 volume percent yttria, based on the total volume of the target;
- b) pyrolyzing said green body to provide a pyrolyzed product;
- and
- c) firing said pyrolyzed product in a nonoxidizing atmosphere to provide an electrically conductive sputtering target comprising (i) at least 35 volume percent yttria, based on the total volume of the target, present as a porous structure having a series of interconnecting channels, and (ii) a substantially continuous amorphous carbon coating on internal surfaces of said porous structure such that said target is electrically conductive.
An electrically conductive sputtering target comprising a substantially continuous pore network of yttria and a substantially continuous amorphous carbon coating on internal surfaces of said pore network such that said target is electrically conductive, said target comprising at least 35 volume percent yttria, based on the total volume of said target.
Dependencies are inferred from the claim text.