Liquid crystal display device having a management symbol pattern formed on a substrate
AssigneeHitachi, Ltd.
InventorsMasahiko Suzuki, Katsuhiko Yarita, Hirobumi Kunito, Jun Kikumoto
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Abstract
Management symbols, such as the type, lot number and production number of an active matrix liquid crystal display panel, can be displayed without any increase in the number of manufacturing steps. A Cr management symbol NO formed at a first patterning step is coated with a gate insulating film GI so that it will not be removed at the time of Cr etching another layer for forming the source and drain electrodes. The management symbol is drawn on the photoresist RST by making use of an X-Y plotter so that different symbols can be easily formed for individual panels.
Claims12
A liquid crystal display device having a thin film transistor comprising:
- an insulating substrate;
- a first-level conductive layer formed over said substrate and constituting a gate electrode of said transistor;
- a first-level insulating layer formed over said first-level conductive layer;
- a semiconductor layer which is formed over said first-level insulating layer and at which an active region is formed;
- a second-level conductive layer forming source and drain electrodes over said semiconductor layer;
- and
- a management symbol pattern formed over said substrate and having an opaque conductive film covered with said first-level insulating layer and containing material which is included in said second-level conductive layer and is different from material included in said first-level conductive layer.
Dependencies are inferred from the claim text.