Soundproofing device for a resonant scanner
AssigneeNikon Corporation
InventorsHisashi Okugawa, Akira Adachi
Life of this patent
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Abstract
A soundproofing device for a resonant scanner for deflecting a laser beam includes a plate member for fixing the resonant scanner, a plurality of stanchions for supporting the plate member, and a base for fixing the stanchions. The stanchions support the plate member at a position at which an amplitude of the plate member at a resonant frequency of the resonant scanner is minimum.
Claims12
A soundproofing device for a resonant scanner resonating at a predetermined frequency to deflect a laser beam, comprising:
- a plate member to support said resonant scanner on a surface of the plate member;
- a plurality of stanchions supporting said plate member and
- a base to which said plate member is fixed by said stanchions, said stanchions supporting said plate member at a position at which an amplitude of vibration of said plate member caused by resonance of said resonant scanner is minimum.
A soundproofing device for a resonant scanner resonating at a predetermined frequency so as to deflect a laser beam, comprising:
- a plate member to support said resonant scanner on a surface of the plate member;
- a plurality of stanchions supporting said plate member;
- and
- a base to which said plate member is fixed by said stanchions, said stanchions supporting said plate member at nodes of vibration of said plate member caused by resonance Of said resonant scanner
Dependencies are inferred from the claim text.