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US 5,476,713 AGranted
Magneto-optical recording medium
AssigneeSony Corporation
InventorsToru Abiko, Mari Yoshida, Takashi Kishi, Hiroshi Nakayama
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AssigneeSony Corporation
InventorsToru Abiko, Mari Yoshida, Takashi Kishi, Hiroshi Nakayama
Estimating the term…
A magneto-optical recording medium having at least two kinds of films consisting of a rare earth metal-transition metal alloy thin film and a dielectric film formed on a substrate. The dielectric film is formed by sputtering a target in an atmosphere containing at least an oxygen gas or a compound gas containing oxygen as one constitutional element. Particularly, the use of a carbon dioxide gas CO.sub.2 or a carbon monoxide gas CO provides for an SiCON film rather than an Si.sub.3 N.sub.4 film. The SiCON film has a refractive index and an absorptivity almost identical with those of the Si.sub.3 N.sub.4 film, and has a thermal conductivity smaller than that of the Si.sub.3 N.sub.4 film. As a result, it has been found that the SiCON film is advantageous from the viewpoints of a magnetic field sensitivity and a film thickness.
A magneto-optical recording medium consisting of a substrate, a first dielectric film formed on the surface of said substrate, a rare earth metal-transition metal alloy film formed on said first dielectric film, a rare earth film formed on said rare earth metal-transition metal alloy film, a second dielectric film formed on said rare earth film and, a reflecting film formed on said second dielectric film, and said first and second dielectric films have a composition of Si.sub.x C.sub.y O.sub.z N.sub.v, where x, y, z, and v satisfy the following conditions:
Dependencies are inferred from the claim text.