Gas feeding device for controlled vaporization of an organometallic compound used in deposition film formation
AssigneeCanon Kabushiki Kaisha
InventorsNobuo Mikoshiba, Kazuo Tsubouchi, Kazuya Masu
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Abstract
A gas feeding device for feeding to a reaction vessel a starting gas for film formation by chemical vapor deposition. The gas feeding device is connected to a container which contains an organometallic compound, and has a plurality of gas introducing openings for introducing a carrier gas into the container for carrying vaporized organometallic compound into the reaction vessel. The gas feeding device includes an accelerating device which selects a carrier gas introducing route into the container through at least one of the plurality of gas introducing openings for accelerating the generation of the starting gas.
Claims8
A gas-feeding device for feeding a starting gas for deposition-film-formation by a chemical vapor deposition method, said device comprising:
- a container for containing an organometallic compound and having a space for forming an atmosphere of a starting gas comprising the organometallic compound;
- gas-introducing means connected to said container and having a plurality of gas-introducing openings for introducing a carrier gas into said container to vaporize the organometallic compound, thereby producing the starting gas;
- and
- accelerating-means, which selects a carrier gas introducing route into said container through at least one of the plurality of gas-introducing openings, for accelerating the generation of the starting gas.
A gas-feeding device for feeding a starting gas for deposition-film-formation by a chemical vapor deposition method, said device comprising:
- organometallic compound-storing means for forming an atmosphere of a starting gas comprising an organometallic compound;
- a plurality of gas-introducing members for introducing a carrier gas into said storing means;
- and
- gas switching means for turning on or turning off feed lines that are capable of distributing the carrier gas and that are respectively connected to each of said plurality of gas-introducing members, and for causing the distribution of the carrier gas to said storing means through at least one turned-on feed line.
A deposition-film-forming apparatus for using a chemical vapor deposition method, said apparatus comprising:
- (1) a gas-feeding device for feeding a starting gas, said device comprising:
- a container for containing an organometallic compound and having a space for forming an atmosphere of the starting gas, which comprises the organometallic compound, for formation of a deposition film;
- gas-introducing means connected to said container and having a plurality of gas-introducing openings for introducing a carrier gas into said container to vaporize the organometallic compound thereby producing the starting gas;
- and
- accelerating means, which selects a carrier gas introducing route into said container through at least one of the plurality of gas-introducing openings, for accelerating the generation of the starting gas;
- (2) a reaction chamber connected to said gas-feeding device for receiving the starting gas;
- and
- (3) exhausting means connected to said reaction chamber for exhausting the starting gas from said reaction chamber.
A deposition-film-forming apparatus for using a chemical vapor deposition method, said apparatus comprising:
- (1) a gas-feeding device for feeding a starting gas, said device comprising:
- organometallic compound-storing means for forming an atmosphere of the starting gas, which comprises an organometallic compound, for deposition film formation;
- a plurality of gas-introducing members for introducing a carrier gas into said storing means;
- and
- gas switching means for turning on or turning off feed lines that are respectively connected to and capable of distributing the carrier gas to each of said plurality of gas-introducing members and for distributing the carrier gas to said storing means through at least one turned-on feed line;
- (2) a reaction chamber connected to said gas-feeding device for receiving the starting gas;
- and
- (3) exhausting means connected to said reaction chamber for exhausting the starting gas from said reaction chamber.
Dependencies are inferred from the claim text.