Unitary micro-flexure structure and method of making same
AssigneeCenstor Corp.
InventorsHarold J. Hamilton, Timothy W. Martin
Life of this patent
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Abstract
A unitary micro-flexure structure and a method of making the same, wherein the structure takes the form of an elongate dielectric flexure body having a mounting end and a free end, and which is adapted for cantilevered disposition, wherein the body takes a form which is constructed entirely from thin-film deposition and patterning processes involving the deposition of a metal oxide, and further wherein the body has a topography which is at least partially determined by etch-removable surface-boundary-defining structure.
Claims15
A micro-flexure structure-making method comprising
- on a substrate structure forming, by thin-film deposition and patterning processes, a flexure body having plural elongate conductor structures with an outline and topography, and
- removing the formed body from the substrate structure.
A micro-flexure structure-making method comprising
- on a substrate structure, depositing and patterning a metal oxide to form a flexure body having a transducer-carrying end with an outline and topography, and
- removing the formed body from the substrate structure.
A micro-flexure structure-making method comprising
- on a substrate structure, depositing and patterning aluminum oxide to form a flexure layer,
- depositing a conductive material and additional aluminum oxide on the flexure layer to form plural conductor structures embedded within a flexure body, and
- removing the formed body from the substrate structure.
A method of making a micro-flexure capable of supporting and operating with a transducer in an electromagnetic read/write system, the method comprising
- on a substrate structure, depositing and patterning aluminum oxide to form a flexure body, and
- removing the formed body from the substrate structure.
A micro-flexure structure-making method comprising
- on a substrate structure, depositing and patterning diamond-like carbon to form a flexure body having an outline and topography, and
- removing the formed body from the substrate structure, wherein the resulting flexure body is capable of supporting and operating with a transducer in an electromagnetic read/write system.
A micro-flexure structure-making method comprising
- on a face in a substrate platform creating an etchable layer shaped as a mold,
- sputtering into such mold an etch-tolerant material, thereby forming a micro-flexure body having an at least partially defined outline and topography, and
- removing the formed body by subjecting the substrate, mold and body to an etchant which reacts therein only with the mold.
A micro-flexure structure-making method comprising
- on a substrate structure, depositing and patterning a metal oxide along with a conductive material to form a flexure body including plural elongate conductor structures, and
- removing the formed body from the substrate structure.
A micro-flexure structure-making method comprising
- on a substrate structure, depositing and patterning aluminum oxide along with a conductive material to form a flexure body including plural elongate conductor structures, and
- removing the formed body from the substrate structure.
A micro-flexure structure-making method comprising
- on a substrate structure, depositing and patterning silicon dioxide along with a conductive material to form a flexure body including plural elongate conductor structures, and
- removing the formed body from the substrate structure.
A micro-flexure structure-making method comprising
- on a substrate structure, depositing and patterning diamond-like carbon along with a conductive material to form a flexure body including plural elongate conductor structures, and
- removing the formed body from the substrate structure.
Dependencies are inferred from the claim text.