Pull method for growth of single crystal using density detector and apparatus therefor
AssigneesResearch Development Corporation of Japan, Hitoshi Sasaki, Kazutaka Terashima
InventorsHitoshi Sasaki, Eiji Tokizaki, Kazutaka Terashima, Akira Nagashima, Shigeyuki Kimura
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Abstract
The density of a melt precisely represents the stability of the melt, so that the initiation of pulling-up operation can be determined on the basis of the changing rate of the density. The pulling-up operation may be started when the density becomes constant, or when the changing rate of the density with respect to the temperature becomes smaller. Since the melt or clusters do not include different minute structures, an obtained single crystal is of high quality free from minute faults or dislocations.
Claims5
A method of pulling a single crystal from a melt comprising;
- detecting the density of a melt to determined the reflection point above which the density deviation of said melt becomes smaller, and
- starting operations for pulling up a single crystal from said melt at the time when said melt is subjected to a thermal hysteresis passing through said reflection point.
A method of pulling a single crystal from a melt comprising:
- dipping the bob of a density detector in a melt,
- weighing said density detector, to calculate the density of said melt,
- detecting the changing rate of the density with respect to the temperature of said melt, and
- starting an operation for pulling up a single crystal from said melt at the time when the changing rate change of said density with respect to the temperature becomes smaller.
A method of pulling a single crystal from a melt comprising:
- dipping the bob of a density detector in a melt,
- weighing said density detector, to calculate the density of said melt,
- detecting the changing rate of the density with respect to the temperature of said melt,
- holding the whole body of said melt at a temperature below the reflection point where the changing rate of said density changes from a larger value to a smaller value, and
- starting an operation for pulling up a single crystal from said melt.
An apparatus for pulling up a single crystal from a melt comprising;
- a crucible for receiving a melt provided in a closed chamber,
- a rotary winder for suspending a seed crystal,
- a density detector having a bob to be dipped in said melt, and
- a control unit to which a value detected by said density detector is inputted,
- whereby the initiation time of pulling-up operation is calculated on the basis of the input data in the control unit, and outputted to said rotary winder.
Dependencies are inferred from the claim text.