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US 5,475,701 AGranted
Integrated laser power monitor
AssigneeHoneywell Inc.
InventorMary K. Hibbs-Brenner
Life of this patent
Estimating the term…
Abstract
A vertical cavity surface emitting laser source having an integrated power monitor at the non-emitting end of the source.
Claims6
An integrated laser power monitor comprising:
- a substrate;
- a photo detector formed on said substrate;
- and
- a laser source having a first end formed on said photo detector and having a second end for the emission of light;
- and
- wherein:
- if said laser source is emitting light from the second end, then some light is leaked from the first end which is detected by said photo detector for indicating an amount of power of light emitted from the second end;
- said substrate is a layer of semi-insulating GaAs;
- said photo detector comprises a layer of GaAs;
- and
- said laser source comprises:
- a first mirror, at the first end of said source, formed on said photo detector, having a stack of alternating Al.sub.x Ga.sub.1-x As and AlAs layers;
- a cavity, formed on said first mirror, having a stack of alternating Al.sub.x Ga.sub.1-x As and GaAs layers;
- and
- a second mirror, at the second end of said source, formed on said cavity, having a stack of alternating AlAs and Al.sub.x Ga.sub.1-x As layers.
12 more elements
An integrated laser power monitor comprising:
- a substrate;
- a photo detector formed on said substrate;
- and
- a laser source having a first end formed on said photo detector and having a second end for the emission of light;
- and
- wherein:
- if said laser source is emitting light from the second end, then some light is leaked from the first end which is detected by said photo detector for indicating an amount of power of light emitted from the second end;
- said substrate is semi-insulating GaAs;
- said photo detector comprises a layer of GaAs;
- and
- said laser source comprises:
- a first mirror, at the first end of said source, formed on said photo detector, having a stack of alternating Al.sub.x Ga.sub.1-x As and AlAs layers;
- a cavity, formed on said first mirror, having a stack of alternating In.sub.x (Al.sub.y Ga.sub.1-y).sub.1-x P and In.sub.z Ga.sub.1-z layers;
- and
- a second mirror, at the second end of said source, formed on said cavity, having a stack of alternating AlAs and Al.sub.x Ga.sub.1-x As layers.
12 more elements
An integrated laser power monitor comprising:
- a substrate;
- a photo detector formed on said substrate;
- and
- a laser source having a first end formed on said photo detector and having a second end for the emission of light;
- and
- wherein:
- if said laser source is emitting light from the second end, then some light is leaked from the first end which is detected by said photo detector for indicating an amount of power of light emitted from the second end;
- said substrate is semi-insulating GaAs;
- said photo detector comprises a layer of In.sub.x Ga.sub.1-x As;
- and
- said laser source comprises:
- a first mirror, at the first end of said source, formed on said photo detector, having a stack of alternating GaAs and AlAs layers;
- a cavity, formed on said first mirror, having a stack of alternating Al.sub.x Ga.sub.1-x As and In.sub.y Ga.sub.1-y As layers;
- and
- a second mirror, at the second end of said source, formed on said cavity, having a stack of alternating AlAs and GaAs layers.
12 more elements
Dependencies are inferred from the claim text.