Transportable image emission microscope
AssigneeHypervision, Inc.
InventorsDaniel T. Hurley, Ching-Lang Chiang, Neeraj Khurana
Life of this patent
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Abstract
An emission microscope is mounted on a transportable structure for use on a test floor and encloses or garages an entire automatic test equipment head to facilitate high-speed testing. Test procedures allow development of static/fixed defects over time. A video mask can be developed based on emission sites on known good devices so that only emission from defect sites of bad devices under test are shown.
Claims6
A transportable Emission Microscope for use with test heads in Automatic Test and Evaluation (ATE) equipment in detecting process and use related defects in semiconductor devices that require both software and parametric test vectors for functional in-use testing for defect localization, said Emission Microscope comprising;
- means for mounting said emission microscope in a transportable structure,
- means for accessing the emission microscope and an emission sensor to a semiconductor device under test (DUT) on an Automatic Test and Evaluation (ATE) test head, with the test head of the automatic test and evaluation equipment being garaged within the emission microscope,
- means for docking the test head of the Automatic Test and Evaluation equipment to the emission microscope directly within the focal plane of the emission microscope for improved isolation from external vibration and,
- means for forming a light tight collar around the Automatic Test and Evaluation equipment test head, the docking mechanism and said DUT.
Dependencies are inferred from the claim text.