US 5,474,864 A · Phase shift mask and manufacturing method thereof and exposure method using phase shift mask

Abstract

A second light transmit portion of a phase shift mask is formed of a molybdenum silicide nitride oxide or a molybdenum silicide oxide a chromium nitride oxide, or a chromium oxide, or a chromium carbide nitride oxide film converting a phase of transmitted exposure light by 180.degree. and having the transmittance of 5-40%. In the manufacturing method of the second light transmit portion, a molybdenum silicide nitride oxide film or a molybdenum silicide oxide film a chromium nitride oxide film, or a chromium oxide film, or a carbide nitride oxide film is formed by a sputtering method. Consequently, with a conventional sputtering apparatus, the second light transmit portion can be formed, and additionally, etching process of the phase shifter portion is required only once, so that probabilities of defects and errors in the manufacturing process can be decreased.

Claims8

Dependent claims

A phase shift mask, comprising:

a substrate transmitting exposure light;
and
a phase shift pattern formed on a main surface of the substrate,
wherein said phase shift pattern includes
a first light transmit portion through which said substrate is exposed, and
a second light transmit portion consisting of a single material having a phase of transmitted exposure light converted by 180.degree. with respect to the phase of exposure light transmitted through said first light transmit portion, said single material having a transmittance of 5-40%, wherein said single material is selected from the group consisting of an oxide of a metal, a nitride oxide of a metal, an oxide of a metal silicide and a nitride oxide of a metal silicide.

3 more elements

Dependencies are inferred from the claim text.

Phase shift mask and manufacturing method thereof and exposure method using phase shift mask

Life of this patent

Phase shift mask and manufacturing method thereof and exposure method using phase shift mask

Life of this patent

Abstract

Claims8