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US 5,474,816 AGranted
Fabrication of amorphous diamond films
AssigneeThe Regents of the University of California
InventorSteven Falabella
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Abstract
Amorphous diamond films having a significant reduction in intrinsic stress are prepared by biasing a substrate to be coated and depositing carbon ions thereon under controlled temperature conditions.
Claims17
A method of coating a substrate with amorphous diamond comprising:
- (a.) cooling said substrate to room temperature or below;
- (b) biasing said substrate at a voltage between about -70 and -225 volts;
- and
- (c) condensing carbon ions having an energy of about 20 to 200 eV. onto said substrate to coat said substrate with a film of substantially hydrogen free amorphous diamond having an intrinsic stress of substantially below 6 GPa.
1 more element
Dependencies are inferred from the claim text.