Process and apparatus for generating precursor gases used in the manufacture of semiconductor devices
AssigneeAT&T Corp.
InventorsGardy Cadet, James W. Mitchell, Jorge L. Valdes
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Abstract
Many devices, such as those based on III-V semiconductor materials, are produced utilizing gases such as arsine that require careful handling of compressed gas cylinders. This care has engendered a search for alternate approaches. It has been found that the use of electrochemically generated gases such as arsine yields an efficient, pure source of such gases without necessitating the storage of large gas quantities. Thus, a device fabrication procedure including in situ electrochemical generation of gases such as arsine is particularly useful.
Claims12
A process for fabricating a device including a material region, said process comprising the steps of supplying a quantity of previously generated precursor gas and employing said gas towards the completion of said device characterized in that said gas is generated in an electrochemical cell and such that substantial storage of said gas and substantial generation of oxygen is avoided, where said cell comprises a basic electrolyte, molybdenum or tungsten anode, an arsenic packed-bed cathode, and a barrier to prevent anions produced during the anodic oxidation of molybdenum or tungsten from contacting the cathode.
A process for fabricating a device including a material region, said process comprising the steps of supplying a quantity of previously generated precursor gas and employing said gas towards the completion of said device characterized in that said gas is generated in an electrochemical cell and such that substantial storage of said gas and substantial generation of oxygen is avoided, where said cell comprises a basic electrolyte, molybdenum or tungsten anode, a germanium packed-bed cathode, and a barrier to prevent anions produced during the anodic oxidation of molybdenum or tungsten from contacting the cathode.
A process for fabricating a device including a material region, said process comprising the steps of supplying a quantity of previously generated precursor gas and employing said gas towards the completion of said device characterized in that said gas is generated in an electrochemical cell and such that substantial storage of said gas and substantial generation of oxygen is avoided, where said cell comprises a basic electrolyte, molybdenum or tungsten anode, an antimony packed-bed cathode, and a barrier to prevent anions produced during the anodic oxidation of molybdenum or tungsten from contacting the cathode.
An electrochemical cell for the generation of precursor gases, said cell comprising a basic electrolyte, a molybdenum or tungsten anode, an arsenic packed-bed cathode, and a barrier to prevent anions produced during the anodic oxidation of molybdenum or tungsten from contacting the cathode wherein substantial generation of oxygen during operation of said cell is avoided.
Dependencies are inferred from the claim text.