Apparatus for the treatment of a solid body
AssigneeOverseas Publishers Association
InventorsEugene Zorina, Vladimir Ivanov, Pavel Kulik, Alexis Logoshin, Alim Tchabanov, George Pavlov, Vecleslav Shvetchov
Life of this patent
Estimating the term…
Abstract
Plasma treatment apparatus includes means to generate a plasma jet at atmospheric pressure, and means to control both the cross-sectional size of the jet and the relative speed of movement between the jet and a body being treated.
Claims15
Apparatus for use in the plasma treatment of a body, including a plasma jet generator, the plasma jet generator having means for generating a plasma jet at atmospheric pressure, a plasma forming gas supply system arranged to supply a plasma forming gas to the generator, and a support for a body to be treated with the plasma jet, being generated at atmospheric pressure, the plasma jet and the support for the body to be treated being mounted for successive relative movements with respect to one another in one direction in at least one coordinate axis in such a way that the support for the body and the plasma jet may be in or out of contact as required, means for controlling both the speed of relative movement between the support and the plasma jet and the cross-sectional size of the plasma jet which is generated at atmospheric pressure according to the relative values of the said speed and the said size in order to provide a required degree of treatment.
Apparatus for use in the plasma treatment of a body, including a plasma jet generator, the plasma jet generator having means for generating a plasma jet at atmospheric pressure, a plasma forming gas supply system arranged to supply a plasma forming gas to the generator, and a support for a body to be treated with the plasma jet, the plasma jet being generated at atmospheric pressure, the plasma jet and the support for the body to be treated being mounted for relative movement with respect to one another in the direction of at least one coordinate axis in such a way that the support for the body and the plasma jet may be in or out of contact as required, means for controlling (1) the speed of relative movement between the support and the jet both in and out of contact with one another and (2) the cross-sectional size of the plasma jet which is generated at atmospheric pressure, the controlling means including means for detecting the brightness of the plasma jet, the output of the means for detecting the brightness of the plasma jet being used to control the cross-sectional size of the plasma jet.
Apparatus for use in the plasma treatment of a body comprising a plasma jet generator, a support for a body to be treated with the plasma jet, the plasma jet and the support for the body to be treated being mounted for relative movement with respect to one another in the direction of at least one coordinate axis in such a way that the support for the body and the plasma jet may be in or out of contact as required, means for controlling (1) the speed of relative movement between the support and the jet both in and out of contact with one another and (2) the cross-sectional size of the plasma jet, the controlling means controlling the cross-sectional area of the plasma jet in response to an indication of the plasma jet brightness.
Dependencies are inferred from the claim text.