Processing method and apparatus thereof

A processing apparatus provided with a processing chamber in which an object to be processed is processed in an atmosphere of a processing gas, said processing apparatus comprising:

• a rotational means,
• a mounting stand connected to said rotational means,
• a pair of holders provided uprightly on said mounting stand to hold said object to be processed therebetween within said processing chamber,
• a supply pipeline for supplying an acidic solution to an upper surface of said object to be processed, and
• another rotational mechanism provided with said holders for rotating said object to be processed, whereby a front surface and a rear surface of said object to be processed are repeatedly inverted relative to a plane perpendicular to the upper surface of said mounting stand.

A method of processing an object to be processed in an atmosphere of a processing gas by use of a processing chamber means, the processing chamber means including a rotatable means, a mounting stand connected to the rotatable means to be rotated thereby, a pair of holders disposed uprightly on the mounting stand, each of the holders having an object holder portion, and another rotatable means provided with the holders, said processing method comprising the steps of:

• supporting an object to be processed between the holders by the object holder portions,
• causing the rotatable means to rotate the mounting stand together with said object to be processed in a predetermined direction;
• and
• causing the rotatable means to stop rotation of the mounting stand, and
• causing the another rotatable means to rotate the object holder portions to invert a front surface and a rear surface of said object to be processed relative to a plane perpendicular to the upper surface of the mounting stand.