Method for rinsing plate-shaped articles
AssigneeFujitsu Limited
InventorsYuka Hayami, Masanori Kobayashi, Ken Yamazaki
Life of this patent
Estimating the term…
Abstract
A plate-shaped article is immersed in a cleaning liquid filling a cleaning bath having an overflowing surface through which the cleaning liquid flows out, and is rinsed out. In the cleaning bath, streams mostly being directed away from a predetermined plane approximately perpendicular to the overflowing surface are formed. The plate-shaped article is then brought into the cleaning liquid having the stream maintaining a state where the plate-shaped article intersects the predetermined plane and the surfaces of the plate-shaped article are in approximately parallel to the streams mostly being directed away from the predetermined plane on the surface of the cleaning liquid.
Claims2
A method for rinsing a plate-shaped article through immersion in a cleaning liquid in a cleaning bath having a surface S.sub.0, through which the cleaning liquid flows out, said method comprising the steps of:
- (a) forming streams of cleaning liquid by substantially directing the streams of cleaning liquid away from a plane S.sub.1, wherein the step of forming streams of cleaning liquid comprises the step of forming a bulge portion of the cleaning liquid along an intersection line, wherein said intersection line intersects the S.sub.0 surface and extends along the S.sub.1 plane, said S.sub.1 plane extending from the S.sub.0 surface to a bottom portion of said cleaning bath and being substantially perpendicular to the S.sub.0 surface;
- and
- (b) bringing the plate-shaped article into said bulge portion of the cleaning liquid so as to intersect the S.sub.1 plane such that the surfaces of the plate-shaped article are substantially parallel to the streams of cleaning liquid directed away from the S.sub.1 plane on the surface of the cleaning liquid,
- wherein said step of forming said streams of cleaning liquid includes the step of causing the S.sub.0 surface of the cleaning bath to go down by reducing the heights of the walls of said cleaning bath which walls face the S.sub.1 plane so that the streams of cleaning liquid which are substantially directed away from the S.sub.1 plane to said walls facing the S.sub.1 plane are formed.
A method for rinsing a plate-shaped article through immersion in a cleaning liquid in a cleaning bath having a surface S.sub.0, through which the cleaning liquid flows out, said method comprising the steps of:
- (a) forming streams of cleaning liquid by substantially directing the streams of cleaning liquid away from a plane S.sub.1, wherein the step of forming streams of cleaning liquid comprises the step of forming a bulge portion of the cleaning liquid along an intersection line, wherein said intersection line intersects the S.sub.0 surface and extends along the S.sub.1 plane, said S.sub.1 plane extending from the S.sub.0 surface to a bottom portion of said cleaning bath and being substantially perpendicular to the S.sub.0 surface;
- and
- (b) bringing the plate-shaped article into said bulge portion of the cleaning liquid so as to intersect the S.sub.1 plane such that the surfaces of the plate-shaped article are substantially parallel to the streams of cleaning liquid directed away from the S.sub.1 plane on the surface of the cleaning liquid,
- wherein the step of forming said bulge portion includes the step of jetting the cleaning liquid from a lower part of said cleaning bath toward the S.sub.0 surface of said cleaning bath under a condition in which a jetting pressure of the cleaning liquid decreases with increasing distance from the S.sub.1 plane so that the surface of the cleaning liquid bulges along said intersection line of the S.sub.0 surface of the cleaning bath and S.sub.1 plane.
Dependencies are inferred from the claim text.