UV light-permeable glass and article comprising the same

A method of making an optical glass permeable to UV light having a wave length of 155 nm to 400 nm comprising a fluorine-doped synthetic quartz glass having a composition of SiO.sub.1.5 F in which a content of fluorine is about 1.5 to 3.0 percent by weight and which contains E' center defects in a decreased concentration, comprising the steps of:

• reacting fluorine or a fluorine containing dopant with a porous quartz mass or a soot mass of quartz glass under conditions such that the resulting synthetic quartz glass has a composition of SiO.sub.1.5 F and a content of fluorine of about 1.5 to 3.0 percent by weight.