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US 5,473,933 AGranted
Humidity sensor
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsMamoru Soga, Shinji Ozaki, Shigeo Ikuta, Kazufumi Ogawa
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Abstract
A humidity sensor with an excellent water-repelling property is presented by covalently bonding a monomolecular film containing fluoroalkyl groups to the surface of a humidity sensing element, used for the sensor, via siloxane bonding. A chemically adsorbed monomolecular film containing fluoroalkyl groups is formed on the surface of a humidity sensing element via siloxane bonding after dipping and holding the element in a surface active solution such as heptadecafluorotridecyl trichlorosilane, and removing the unreacted material.
Claims7
A humidity sensor comprising:
- a chemically adsorbed film comprising molecules possessing fluorocarbon groups, said film bonded to a surface of a humidity sensing element or a casing used for housing said humidity sensing element via--Si-- covalent bonding, wherein trifluoro groups are arranged in an outer layer of said chemically adsorbed film, and wherein said surface is coated with said chemically adsorbed film.
Dependencies are inferred from the claim text.