Illuminating system, projection apparatus and detecting apparatus
AssigneeNikon Corporation
InventorYuji Manabe
Life of this patent
Estimating the term…
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AssigneeNikon Corporation
InventorYuji Manabe
Estimating the term…
Disclosed are a projection apparatus, an illuminating system and a detecting apparatus with the illuminating system. The projection apparatus includes a light valve, a light source, a fly's eye lens disposed in light beams from the light source, a relay optical system, having an optical axis parallel to a normal line of the light valve, for guiding the light beams emerging from the fly's eye lens to the light valve, an imaging optical system through which the light valve is conjugate to a screen and an optical path split element for guiding the light beams from the light source to the reflection type light valve and, at the same time, guiding reflected light beams from the light valve to the imaging optical system. The illuminating system includes a light source, a fly's eye lens having lens elements, an optical path split element having a light split surface disposed in focal positions of the lens elements and a relay optical system. The detecting apparatus with an illuminating system includes a light source, a fly's eye lens having lens elements, an optical path split element having a light split surface disposed in focal positions of the lens elements, a relay optical system and a detector.
A projection apparatus comprising:
A projection apparatus comprising:
A projection apparatus comprising:
An illuminating system comprising:
A detecting apparatus with an illuminating system, comprising:
Dependencies are inferred from the claim text.