Semiconductor device tester capable of simultaneously testing a plurality of integrated circuits at the same temperature
AssigneeNEC Corporation
InventorKunihiro Takeda
Life of this patent
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Abstract
In an IC tester configured to simultaneously test a plurality of test ICs, each of the test ICs includes a temperature sensor part for detecting the temperature of the test IC itself. A controller receives a temperature detection signal from each test IC and controls a plurality of pulse generators each provided for supplying a pulse signal to a corresponding one of the test ICs. Each pulse generator is controlled by the controller to change the frequency of the pulse signal so as to maintain the temperature of the corresponding test IC at a target temperature in common to all the test ICs to permit simultaneous testing in the IC tester.
Claims5
A semiconductor device tester comprising a testing apparatus having an internal space in which a plurality of test ICs are located, a first temperature measuring means for measuring an internal temperature of the testing apparatus, a second temperature measuring means for measuring the temperature of each of the test ICs, a controller connected to the first measuring means and the second measuring means and for generating a first control signal in response to a signal from the first measuring means and for generating second control signals in response to input signals from the second measuring means, a heating-cooling device responding to the first control signal to control the internal temperature of the testing apparatus, and pulse generator means supplying a pulse signal to each IC, and responding to the second control signals for changing a frequency of each pulse signal so as to maintain the temperature of each test IC at the same target temperature.
Dependencies are inferred from the claim text.