US 5,473,136 A · Method and apparatus for the machining of material by means of a laser

Abstract

In a method for the machining of material using a laser with detection of the material to be machined, laser light is directed at the material via a laser optical system and the light re-emitted by the material is guided to a first detector arrangement which measures the intensity of the light and behind which there is connected an evaluation circuit for controlling the laser power or energy. The energy fed to the material via the laser optical system is measured, and the detector arrangement supplies to the evaluation circuit a display signal which indicates the beginning of the dielectric breakdown. The evaluation circuit reduces the power of the laser and/or interrupts the laser pulse if no display signal has as yet occurred at a predetermined time at which a predetermined energy was fed to the material.

Claims14

Dependent claims

A method for the machining of material by means of a laser with detection of the material to be machined, said method comprising:

directing laser light of a predetermined wavelength and of sufficient energy from said laser via a laser optical system onto said material to cause a dielectric breakdown of said material;
measuring the energy of said laser light directed onto said material via said laser optical system;
guiding light re-emitted by the material to a first detector arrangement;
measuring the intensity of said re-emitted light at said first detector arrangement, said first detector arrangement providing an indication signal if a dielectric breakdown on said material has commenced;
providing said indication signal to an evaluation circuit for controlling the power of said laser light, said evaluation circuit reducing said laser power if no indication signal has as yet occurred after a predetermined energy of said laser light has been directed to said material.

2 more elements

An apparatus for the machining of material by means of a laser providing laser light pulses of predetermined wavelength and of predetermined power, comprising:

a laser optical system guiding said laser light pulses to said material and deflecting light re-emitted by said material to a first detector arrangement which measures the intensity of said re-emitted light and provides an output signal to an evaluation circuit;
an additional detector arrangement for measuring the energy of said laser light pulses fed to said material via the laser optical system, an output signal of said additional detector arrangement representing said energy being fed to the evaluation circuit;
said first detector arrangement supplying to said evaluation circuit an indication signal indicating a dielectric breakdown of the material;
and
said evaluation circuit, upon the absence of said indication signal and after measurement of a predetermined energy, doing one of (a) reducing the power of said laser pulses, (b) interrupting said laser pulse via a rapid-action optical switch and (c) reducing the power of said laser pulses and interrupting said laser pulse via a rapid-action optical switch.

2 more elements

Dependencies are inferred from the claim text.

Method and apparatus for the machining of material by means of a laser

Life of this patent

Method and apparatus for the machining of material by means of a laser

Life of this patent

Abstract

Claims14