Multilayer nanolaminates containing polycrystalline zirconia
AssigneeBoard of Regents of The University of The University of Wisconsin System, on Behalf of The University of Wisconsin-Milwaukee
InventorCarolyn R. Atita
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Abstract
Layers of zirconium oxide and another ceramic, such as alumina or silicon carbide, are sequentially deposited on a support to form a nanolaminate containing a thin layer of polycrystalline metastable tetragonal zirconia deposited on the support. A process for making a nanolaminate material of the invention is carried out by sputter deposition. Zirconia is deposited on the chosen support by vacuum sputter deposition under conditions effective to form a thin layer of polycrystalline, metastable tetragonal zirconia on the support. A hard ceramic such as alumina is then deposited on the support by vacuum sputter deposition under conditions effective to form a thin layer of hard ceramic superposed on the zirconia layer.
Claims16
A laminate product, comprising:
- a support;
- a thin layer consisting essentially of polycrystalline metastable tetragonal zirconia superposed on the support;
- and
- a thin layer of a hard ceramic other than zirconia formed directly on the zirconia layer.
A laminate product, comprising:
- a support;
- a layer consisting essentially of polycrystalline metastable tetragonal zirconia having a maximum thickness of 6 nm superposed on the support, wherein the metastable tetragonal zirconia is capable of undergoing a transition to a monoclinic zirconia phase upon application of stress to the zirconia layer;
- and
- a layer consisting essentially of a hard ceramic selected from the group consisting of oxides, nitrides, and carbides, and mixtures thereof, and having a thickness in the range of 3 nm to about 1 micron formed directly on the zirconia layer.
Dependencies are inferred from the claim text.