Modified anion exchange process
AssigneeShipley Company, L.L.C.
InventorsCharles R. Szmanda, Richard J. Carey
Life of this patent
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Abstract
The invention is for a process of removing anions from an organic solution, especially one having base labile components. The process comprises modifying an anion exchange resin by treatment with a solution of a source of anions less basic than the hydroxyl anion and contacting said modified ion exchange resin with an organic solution containing anions. The process is especially useful for treating photoresist compositions.
Claims17
A process for removing anionic contaminants from an organic solution containing a base labile solute, said process comprising the steps of contacting said organic solution with an anion exchange resin that has had strong basic groups displaced by weaker anions having a basicity less than that of the hydroxyl anion, the contact between the organic solution and the modified anion exchange resin being for a time sufficient to remove essentially all anionic contaminants from solution.
A process for removing anionic contaminants from an organic solution containing a base labile solute, said process comprising the steps of providing an anion exchange resin treated with an aqueous solution of a weaker anion less basic than the hydroxyl anion for a time sufficient to displace substantially all of the strong basic groups on said exchange resin with said weakly-basic anions and contacting said organic solution with said anion exchange resin for a time sufficient to remove essentially all anionic contaminants from solution.
A process for removing anionic contaminants from a base labile organic solution used in the manufacture of integrated circuits, said process comprising the steps of contacting said organic solution with an anion exchange resin that has had strong basic groups displaced by contact with a source of weaker anions that are less basic than hydroxyl anions, the contact between the organic solution and the anion exchange resin being for a time sufficient to remove essentially all anionic contaminants from said solution.
Dependencies are inferred from the claim text.