Specimen holder and apparatus for two-sided ion milling system
AssigneeGatan, Inc.
InventorsPeter R. Swann, Reza Alani
Life of this patent
Estimating the term…
Abstract
An apparatus and a specimen holder adapted to permit simultaneous two-sided ion beam milling at very low angles of beam incidence, down to 0.degree., from both sides of the specimen is provided and includes a specimen holder for two-sided ion beam milling and a pedestal having at least one extending specimen support arm adapted to engage a peripheral edge of a specimen. The specimen is secured to the at least one specimen support arm, preferably, so as to permit ion beams to be directed at the first and second major surfaces of the specimen simultaneously at very low angles of incidence down to 0.degree.. Both rapid milling as well as a reduction in artifacts provide high quality specimens for transmission electron microscopy analysis.
Claims24
A specimen holder for two-sided ion beam milling comprising:
- a pedestal having at least one extending specimen support arm adapted to engage a peripheral edge of a specimen having first and second major surfaces such that at least a portion of said peripheral edge of said specimen remains unrestrained by said support arm and spaced from said pedestal;
- and
- means for securing said specimen to said at least one specimen support arm.
An apparatus for two-sided ion beam milling comprising:
- a vacuum chamber and means for providing a vacuum within said chamber;
- a specimen holder within said chamber for holding a specimen to be milled;
- a plurality of ion guns within said chamber, at least one of said guns positioned to provide an ion beam to a first side of said specimen and at least one other of said guns positioned to provide an ion beam to a second side of said specimen, said plurality of guns be adjustable to provide very low milling angles of incidence down to 0.degree..
A method for the two-sided ion beam milling of specimens comprising the steps of:
- providing a specimen having first and second major surfaces and a peripheral edge to be milled to a vacuum chamber and securing said specimen such that at least a portion of said peripheral edge remains unrestrained,
- evacuating said chamber to form a vacuum therein, and
- ion milling said specimen using a milling angle down to 0.degree..
Dependencies are inferred from the claim text.