Superconducting films on alkaline earth fluoride substrates with multiple buffer layers
AssigneeNeocera, Inc.
InventorsKolagani S. Harshavardhan, Thirumalai Venkatesan, Steven Green
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Abstract
A high frequency superconducting device structure is disclosed which comprises an alkaline earth fluoride substrate with a magnesium oxide lower buffer layer on the alkaline earth substrate and an upper buffer layer epitaxial template layer on the magnesium oxide layer for providing a template for epitaxial growth of a high temperature superconducting film on the upper buffer layer, providing reduced dielectric and conducting losses at high frequencies. The disclosed structure may be incorporated into a multi-chip module (MCM) for providing very high speed interconnections.
Claims1
A substrate fixture for pulsed laser deposition, comprising:
- an enclosure for enclosing a plurality of substrates therein:
- means for holding the plurality of substrates so that major surfaces of the substrates are parallel to one another and the substrates are spaced apart, said means for holding disposed in the enclosure;
- means for rotating, relative to the enclosure, the means for holding about an axis which is perpendicular to the major surfaces of the substrates so that substrates held by the means for holding are rotated;
- and
- wherein the enclosure has an opening with an opening width along a direction perpendicular to the major surfaces of substrates held in the means for holding, which is at least as large as the separation between furthest substrates held by the means for holding.
Dependencies are inferred from the claim text.