Method and apparatus for producing magnetic recording medium
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsKiyokazu Tohma, Ryuji Sugita, Tatsuaki Ishida, Yasuaki Ban
Life of this patent
Estimating the term…
Abstract
A magnetic recording medium having good high density recording characteristics is produced by forming a magnetic layer on a substrate which is traveling around a peripheral surface of a cylindrical can by an oblique vapor deposition method to form a magnetic layer comprising cobalt, an axis of easy magnetization of which inclined from a line normal to the layer plane. A residual gas pressure in an initial region of the formation of the magnetic layer is kept as low as possible, in particular, the residual gas pressure in the initial region of the formation of the magnetic layer is lower than in the other part of the production apparatus.
Claims12
A vacuum deposition apparatus for producing a magnetic recording medium by forming a magnetic layer on a substrate said apparatus comprising:
- vacuum vessel part of which is evacuated by an evacuation pump through an exhaust outlet;
- a cylindrical drum having a peripheral surface around which a substrate travels;
- at least one first initial incident region shielding plate which defines an initial incident angle of an atom vapor of a magnetic metal in relation to the substrate;
- at least one final incident region shielding plate which defines a final incident angle of the atom vapor of the magnetic metal in relation to the substrate;
- a pair of partition plates which are provided upstream and downstream, respectively, of said at least one initial incident region shielding plate with respect to the direction of travel of the substrate to form a room surrounding said at least one initial incident region shielding plate defining the initial incident angle of the atom vapor;
- and means for evacuating said room independently from the part of said vacuum vessel evacuated by said evacuation pump.
Dependencies are inferred from the claim text.