Coating solution for forming glassy layers
AssigneesHyundai Electronics America, AT&T Global Information Solutions Company
InventorDerryl D. J. Allman
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Abstract
There is disclosed doped spin-on glass compositions such as boronoxide doped spin-on glass compositions with a high carbon content and silane adhesion promoter incorporated therein for use as coating layers on substrates such as silicon wafers.
Claims11
A coating solution for forming glassy layers comprising a solution of crosslinked polyorganosiloxane having at least 30 wt. % carbon and a silane adhesion promoter incorporated therein and a dopant.
A spin-on glass composition comprising a solution of crosslinked polyorganosiloxane having at least 15 wt. % carbon and a silane adhesion promoter incorporated therein and a boron-oxide dopant.
A spin-on glass composition comprising a solution of cross-linked polyorganosiloxane which has 15-50 atomic wt. % carbon, alkyl groups of from 1 to 4 carbon atoms, an aminoorganotrialkoxysilane incorporated therein and a boron-oxide dopant incorporated therein.
Dependencies are inferred from the claim text.