Method for forming crystal article
AssigneeCanon Kabushiki Kaisha
InventorNobuhiko Sato
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Abstract
A method for forming a crystal article comprises forming a plurality of monocrystals with a desired size at a desired position on a substrate comprising an amorphous insulating material and having a non-nucleation surface by crystal forming treatment, wherein prior to the crystal forming treatment a plurality of concavities with a desired size and form are formed respectively in a region to be covered with a single monocrystal on the substrate, and a single monocrystal is formed to full the plurality of concavities by the crystal forming treatment and thereafter the monocrystal is flattened by removing it to the same level as the upper surface of the substrate.
Claims7
A method for forming a crystal article comprising the steps of:
- (a) providing a substrate having a non-nucleation surface comprising an amorphous insulating material,
- (b) forming a plurality of concavities, each concavity having a prescribed size and form in a region to be covered with a single monocrystal corresponding in size and form to each of said concavity on the substrate,
- (c) forming a seed crystal or a nucleation surface for monocrystal formation at any position within the region on the substrate,
- (d) growing a monocrystal from the seed crystal or the nucleation surface to cover the plurality of concavities with the monocrystal, and
- (e) flattening the monocrystal by removing it to the same level as the upper surface of the substrate,
- wherein the plurality of concavities have different sizes and forms.
Dependencies are inferred from the claim text.