Quartz thickness-shear mode resonator temperature-compensated pressure transducer with matching thermal time constants of pressure and temperature sensors
AssigneeQuartzdyne, Inc.
InventorRobert B. Wiggins
Life of this patent
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Abstract
A pressure transducer assembly for measuring fluid pressure. The transducer assembly includes a thickness-shear mode resonator pressure sensor and a thickness-shear mode resonator temperature sensor for temperature compensation of the pressure sensor. Both sensors are exposed to the pressurized fluid, and possess similar thermal time constants. The temperature sensor possesses a pressure sensitivity less than that of the pressure sensor, and a temperature sensitivity greater than that of the pressure sensor. The pressure and temperature sensors may be of similar size and configuration, and may be fabricated from the same material, such as quartz.
Claims20
A transducer sensor assembly responsive to applied pressure, comprising:
- a pressure housing defining a chamber containing a fluid under said applied pressure;
- first pressure responsive sensor means located in said chamber and exposed to said fluid under said pressure for providing a frequency output responsive to variations of said pressure;
- and
- second pressure responsive sensor means possessing a pressure sensitivity less than one-half of that of said first sensor means and a temperature sensitivity different from that of said first sensor means, located in said chamber and exposed to said fluid under said pressure, for providing an output for temperature compensation of said pressure responsive frequency output of said first sensor means.
A transducer sensor assembly responsive to applied pressure, comprising:
- a pressure housing defining a chamber containing a fluid under said applied pressure;
- first pressure responsive sensor means located in said chamber and exposed to said fluid under said pressure for providing a frequency output responsive to variations of said pressure;
- and
- second pressure responsive sensor means possessing a pressure sensitivity less than one-half of that of said first sensor means, located in said chamber and exposed to said fluid under said pressure, for providing an output for temperature compensation of said pressure responsive frequency output of said first sensor means;
- at least one of said first and second sensor means including a resonator of non-circular configuration.
A transducer sensor assembly responsive to applied pressure, comprising:
- a pressure housing defining a chamber containing a fluid under said applied pressure;
- first pressure responsive sensor means including a thickness-shear mode resonator located in said chamber and exposed to said fluid under said pressure for providing a frequency output responsive to variations of said pressure;
- and
- second pressure responsive sensor means including a thickness-shear mode resonator and possessing a pressure sensitivity less than one-half of that of said first sensor means, located in said chamber and exposed to said fluid under said pressure, for providing an output for temperature compensation of said pressure responsive frequency output of said first sensor means.
A transducer sensor assembly responsive to applied pressure, comprising:
- a pressure housing defining a chamber containing a fluid under said applied pressure;
- first pressure responsive sensor means located in said chamber and exposed to said fluid under said pressure for providing a frequency output responsive to variations of said pressure;
- and
- second pressure responsive sensor means possessing a pressure sensitivity less than one-half of that of said first sensor means, located in said chamber and exposed to said fluid under said pressure, for providing an output for temperature compensation of said pressure responsive frequency output of said first sensor means.
Dependencies are inferred from the claim text.