Acoustic liquid level measuring apparatus
AssigneeSemitool, Inc.
InventorCharles A. Cummings
Life of this patent
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AssigneeSemitool, Inc.
InventorCharles A. Cummings
Estimating the term…
An acoustic liquid level detector system includes, a) a first acoustic wave guide; b) an acoustic wave transmitter and an acoustic wave receiver operably associated with the first acoustic wave guide to transfer acoustic waves between, i) the acoustic transmitter and receiver; and ii) the first acoustic wave guide; c) a second acoustic wave guide; d) an angled juncture interconnecting the first acoustic wave guide to the second acoustic wave guide; e) a primary acoustic reflector provided in the angled juncture to angularly reflect acoustic waves between the first and second acoustic wave guides; and f) a secondary acoustic reflector positioned to directly reflect an acoustic wave emanating from the acoustic wave transmitter to the acoustic wave receiver. The second acoustic wave guide is provided with a plurality of longitudinally spaced orifices to facilitate ingress of liquid and flow of a cleaning purge gas outwardly of the second acoustic wave guide. A purge gas port is provided in the first acoustic wave guide for injecting purge gas into the system.
An acoustic liquid level detector system comprising:
An acoustic liquid level detector system comprising:
An acoustic liquid level detector system comprising:
An acoustic liquid level detector system comprising:
An acoustic liquid level detector system comprising:
Dependencies are inferred from the claim text.