US 5,471,303 A · Combination of white-light scanning and phase-shifting interferometry for surface profile measurements

Abstract

Interferometric apparatus that combines white-light VSI and single-wavelength PSI capabilities to improve the accuracy of height measurements in steep regions and in areas with large inter-pixel steps on the test surface. The technique consists of performing VSI measurements to obtain a relatively coarse profile of the test surface and to identify regions separated by a large step. Then PSI measurements are carried out over the test surface to obtain a relatively fine profile. Offsets between VSI and PSI measurements are calculated to correct for misalignments and phase shifts that may have occurred between the two sets of measurements. Finally, the fine PSI data are integrated to within one quarter wavelength of the coarse VSI data. The resulting quality of the height data in each of the step regions is thus improved to within the resolution of the PSI measurements.

Claims15

Dependent claims

A method of profiling a height of a test surface using apparatus adapted to alternatively execute broad-bandwidth scanning or phase-shifting interferometric measurements by illuminating the test surface and a reference arm aligned in an optical path to provide an interference pattern on an array of detector cells, comprising the following steps:

(a) using a broad-bandwidth light source to illuminate said test surface and reference arm while effecting a relative translation therebetween to produce a plurality of broad-bandwidth interference patterns on said detector cells, such that a coarse height for a region of said test surface corresponding to each detector cell is calculated by application of a scanning interferometric technique;
(b) using a narrow-bandwidth light source having a central wavelength to illuminate said test surface and reference arm while effecting a relative translation therebetween to produce a plurality of single-wavelength interference patterns on said detector cells, such that phase data comprising a phase and a fine height for said region of the test surface corresponding to each detector cell are calculated by application of a phase-shifting interferometric technique;
and
(c) integrating said phase data to produce a vertically-integrated fine height for each said region of the test surface by adding or subtracting multiples of one half of said central wavelength of said narrow-bandwidth light source to or from each said fine height calculated in step (b) for each detector cell, such that the difference between said vertically-integrated fine height and said coarse height is less than one quarter of the central wavelength.

1 more element

A method of profiling a height of a test surface using apparatus adapted to alternatively execute white-light vertical-scanning or phase-shifting interferometric measurements by illuminating the test surface and a reference arm aligned in an optical path to provide an interference pattern on an array of detector cells, comprising the following steps:

(a) using a white-light source to illuminate said test surface and reference arm while effecting a relative translation therebetween to produce a plurality of white-light interference patterns on said detector cells, such that a coarse height for a region of said test surface corresponding to each detector cell calculated by application of a vertical-scanning interferometric technique;
(b) using a substantially-monochromatic light source having a central wavelength to illuminate said test surface and reference arm while effecting a relative translation therebetween to produce a plurality of single-wavelength interference patterns on said detector cells, such that phase data comprising a phase and a fine height for said region of the test surface corresponding to each detector cell are calculated by application of a phase-shifting interferometric technique;
and
(c) integrating said phase data to produce a vertically-integrated fine height for each said region of the test surface by adding or subtracting multiples of one half of said central wavelength of said substantially-monochromatic light source to or from each said fine height calculated in step (b) for each detector cell, such that the difference between said vertically-integrated fine height and said coarse height is less than one quarter of the central wavelength.

1 more element

Apparatus for profiling a height of a test surface by executing white-light vertical-scanning and phase-shifting interferometric measurements in a single test instrument, said apparatus comprising, in combination:

(a) test-surface arm for holding the test surface;
(b) a reference mirror mounted on a reference arm positioned at a variable distance from said test surface;
(c) an array of light-intensity detectors disposed in an optical path with said test surface and reference mirror;
(d) means for varying the distance between said test surface and said reference mirror by predetermined amounts;
(e) means for emitting a white-light beam to illuminate both said reference mirror and test surface to provide white-light interference patterns on said array of light-intensity detectors as the distance between said test surface and reference mirror is varied according to a vertical-scanning interferometric technique;
(f) means for measuring a plurality of intensities of said white-light interference patterns as a result of vertical-scanning signals produced by said light-intensity detectors and for computing corresponding coarse height measurements for the test surface by application of said vertical-scanning interferometric technique, such that a coarse height for a region of said test surface corresponding to each light-intensity detector is calculated;
(g) means for emitting a quasi-monochromatic light beam having a central wavelength to illuminate both said reference mirror and test surface to provide single-wavelength interference patterns on said array of light-intensity detectors as the distance between said test surface and reference mirror is varied according to a phase-shifting interferometric technique;
(h) means for measuring a plurality of intensities of said single-wavelength interference patterns as a result of phase-shifting signals produced by said light-intensity detectors and for computing corresponding phase data comprising phase and fine height measurements for the test surface by application of said phase-shifting interferometric technique, such that a phase and a fine height for said region of the test surface corresponding to each light-intensity detector are calculated;
and
means for integrating said phase data to produce a vertically-integrated fine height for each said region of the test surface by adding or subtracting multiples of one half of said central wavelength of said quasi-monochromatic light to or from each said fine height, such that the difference between said vertically-integrated fine height and said coarse height is less than one quarter of the central wavelength.

7 more elements

Dependencies are inferred from the claim text.

Combination of white-light scanning and phase-shifting interferometry for surface profile measurements

Life of this patent

Combination of white-light scanning and phase-shifting interferometry for surface profile measurements

Life of this patent

Abstract

Claims15