Method and apparatus for measuring size of particle or defect
AssigneeMitsui Minings & Melting Co., Ltd.
InventorKazuo Moriya
Life of this patent
Estimating the term…
Abstract
A size of particle or defect in an object is measured. A laser beam is guided through an optical system into the object. A light receiving element receives scattered light from a particle or a defect in the object. A scattering image is formed by an image processor from the scattered light thus received. The size of particle or defect is obtained by integrating a scattering intensity of the scattered light. Also, a size distribution of particle or defect in an object may be acquired by detecting a maximum scattering intensity of each particle or defect. A polarization dependency of scattering may be checked as well.
Claims12
A method for measuring a size of particle or defect, comprising:
- a step of irradiating an object with a laser beam;
- a step of receiving scattered light from a particle or defect in said object and image-processing said scattered light received;
- and
- a step of integrating a two-dimensional intensity of said scattered light from the particle or defect and determining the size of particle or defect based on the maximum value of the integrated scattered light.
An apparatus for measuring a size of particle or defect in an object, comprising:
- a light source for radiating a laser beam;
- a first optical system for irradiating an object with said laser beam;
- a light receiving element for receiving through a second optical system scattered light from a particle or defect in said object;
- means for obtaining a two-dimensional scattering image based on the scattered light detected by said light receiving element;
- and
- means for integrating the two-dimensional scattering intensity of said scattered light and for determining the maximum value of the integrated scattered light to obtain a size of the particle or defect.
An apparatus for measuring a size of particle or defect in an object, comprising:
- a light source for radiating a laser beam;
- a first optical system for irradiating an object with said laser beam;
- a light receiving element for receiving through a second optical system scattered light from a particle or defect in said object;
- and
- means for obtaining a two-dimensional intensity of the scattering image based on the scattered light detected by said light receiving element;
- wherein a maximum scattering intensity of said two-dimensional scattered light from the particle or defect is detected by said means for obtaining a scattering image.
Dependencies are inferred from the claim text.