Semiconductor photodetector using avalanche multiplication and strained layers
AssigneeNEC Corporation
InventorsMasayoshi Tsuji, Kikuo Makita
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AssigneeNEC Corporation
InventorsMasayoshi Tsuji, Kikuo Makita
Estimating the term…
On a p-type InP substrate 12, there are provided a p-type InGaAs light absorptive layer 14 and an InAlAs/InGaAs superlattice avalanche multiplier layer 15. By selecting the composition of the well layer and the barrier layer of the avalanche multiplier layer 15, a strain is applied to at least one of them so that the difference .DELTA. Ec between the energies at the lower end of the conduction band of the well layer and/or the barrier layer is increased, or the difference .DELTA. Ev between the energies at the upper end of the valence band of the well layer and/or the barrier layer is decreased, and/or the effective mass of the hole within the well layer and/or barrier layer is decreased. Thus, the ionization factor ratio is further improved, or the pile-up of the hole is alleviated, or the traveling time of the hole is shortened to achieve an avalanche multiplier semiconductor photodetector having a wide bandwidth, low noise and high response characteristic.
A semiconductor photodetector comprising at least a light absorptive layer and a superlattice avalanche multiplier layer on a semiconductor substrate, electrons generated at said light absorptive layer being injected to said superlattice avalanche multiplier layer under reverse bias, said superlattice avalanche multiplier layer comprising a first semiconductor layer and a second semiconductor layer, the second layer having a lattice structure which matches the lattice structure of the substrate to produce a minimal strain, and wherein EA>EC and EB<ED where the mean ionizing energies of group III atoms and group V atoms of said first semiconductor layer are EA and EB, respectively, and the mean ionizing energies of group III atoms and group V atoms of said second semiconductor layer are EC and ED, respectively,
A semiconductor photodetector comprising at least a light absorptive layer and a superlattice avalanche multiplier layer on a semiconductor substrate, electrons generated at said light absorptive layer being injected to said superlattice avalanche multiplier layer under reverse bias, said superlattice avalanche multiplier layer comprising a first semiconductor layer and a second semiconductor layer, said first semiconductor layer having a lattice structure which matches the lattice of the substrate to provide a minimal strain, and wherein EA>EC and EB<ED where the mean ionizing energies of group III atoms and group V atoms of said first semiconductor layer are EA and EB, respectively, and the mean ionizing energies of group III atoms and group V atoms of said second semiconductor layer are EC and ED, respectively,
A semiconductor photodetector comprising at least a light absorptive layer and a superlattice avalanche multiplier layer on a semiconductor substrate, electrons generated at said light absorptive layer being injected to said superlattice avalanche multiplier layer under reverse bias, said superlattice avalanche multiplier layer comprising a first semiconductor layer and a second semiconductor layer, said first layer having a lattice structure which matches the lattice structure of the substrate to produce a minimal strain, and wherein EA>EC and EB<ED where the mean ionizing energies of group III atoms and group V atoms of said first semiconductor layer are EA and EB, respectively, and the mean ionizing energies of group III atoms and group V atoms of said second semiconductor layer are EC and ED, respectively,
A semiconductor photodetector comprising at least a light absorptive layer and a superlattice avalanche multiplier layer on a semiconductor substrate, electrons generated at said light absorptive layer being injected to said superlattice avalanche multiplier layer under reverse bias, said superlattice avalanche multiplier layer comprising a first semiconductor layer and a second semiconductor layer, said second layer having a lattice structure which matches the lattice structures of the substrate to produce minimal strain, and wherein EA>EC and EB<Ed where the mean ionizing energies of group III atoms and group V atoms of said first semiconductor layer are EA and EB, respectively, and the mean ionizing energies of group III atoms and group V atoms of said second semiconductor layer are EC and ED, respectively,
A semiconductor photodetector comprising at least a light absorptive layer and a superlattice avalanche multiplier layer on a semiconductor substrate, electrons generated at said light absorptive layer being injected to said superlattice avalanche multiplier layer under reverse bias, said superlattice avalanche multiplier comprising a first semiconductor layer and a second semiconductor layer, said second layer having a lattice structure which matches the lattice structure of the substrate to provide a minimum strain, and wherein EA>EC and EB<ED where the mean ionizing energies of group III atoms and group V atoms of said first semiconductor layer are EA and EB, respectively, and the mean ionizing energies of group III atoms and group V atoms of said second semiconductor layer are EC and ED, respectively,
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