Precision machining method, precision machining apparatus and data storage apparatus using the same
AssigneeHitachi, Ltd.
InventorsHajime Koyanagi, Sumio Hosaka, Ryo Imura
Life of this patent
Estimating the term…
Abstract
A method and apparatus for precision machining a surface suitable for use as a data recorder, using a scanning probe microscope (SPM) capable of observing an electrically insulating surface. The SPM includes a probe which comprises a tip having a pointed end, and also including a conductive layer applied on a surface of the tip. The tip is brought into close proximity to the surface which is to be machined and a machining voltage is applied between the tip and the surface to machine the surface.
Claims19
Method of precision machining a surface of a medium using a scanning probe microscope having a probe with a pointed tip projecting therefrom, said method comprising the steps of:
- providing a medium comprising an electrically insulative surface layer carried on an electrically conductive layer;
- providing a conductive layer on a surface of said pointed tip;
- bringing said pointed tip into close proximity to said surface of said workpiece;
- and
- applying a machining voltage between said tip and said electrically conductive layer of said medium, whereby atoms in one of said electrically conductive layer of said tip and a portion of said electrically insulative surface layer of said medium are ionized and transferred between said tip and said medium, forming mounds and depressions on said electrically insulative layer of said medium.
Apparatus for machining a surface of a medium consisting of a layer of electrically insulative material carried on an electrically conductive member, said apparatus comprising:
- a scanning probe microscope having a probe with a pointed tip projecting therefrom, said tip having an electrically conductive surface layer applied to a surface thereof;
- a voltage source coupled to apply voltage between said tip and said electrically conductive member, so as to cause field evaporation of atoms in at least one of said electrically conductive surface layer of said tip and said electrically insulative material of said medium, whereby atoms are transferred to or from said medium;
- and
- an xyz-drive coupled to move said tip in close proximity to said surface.
Apparatus for modifying the surface of a medium, comprising:
- a probe having a pointed tip;
- a conductive material constituting at least a surface layer of said pointed tip;
- a medium holder which holds a a medium comprising a layer of electrically insulative material formed on a surface of an electrically conductive material;
- a detector which detects a distance between a surface of said medium and said tip, and generates signal containing information corresponding to status of a characteristic of a surface of said medium;
- a control circuit coupled to control distance between an end of said tip and the surface of said medium in response to said signal generated by the detector;
- and
- a voltage source coupled to apply a voltage between said tip and the conductive material of said medium to form a protrusion on the insulative surface of said medium in response to input information.
Dependencies are inferred from the claim text.