Pyroelectric infrared radiation detector and method of producing the same

A pyroelectric infrared radiation detector comprising:

• a substrate made of a (100) magnesium oxide single crystal material;
• an infrared radiation detecting structure comprising a first electrode disposed on the substrate, a pyroelectric thin film disposed on the first electrode, and a second electrode disposed on the pyroelectric thin film for absorption of infrared radiation;
• and
• said substrate having a recess provided in the upper surface thereof, where the infrared radiation detecting structure is seated, by etching through two or more etching apertures provided off the infrared radiation detecting structure.

A pyroelectric infrared radiation detector comprising:

• a substrate made of a (100) magnesium oxide single crystal material;
• an infrared radiation detecting structure comprising a first electrode disposed on the substrate, a pyroelectric thin film disposed on the first electrode, and a second electrode disposed on the pyroelectric thin film for absorption of infrared radiation;
• and
• said substrate having a recess provided in the upper surface thereof, where the infrared radiation detecting structure is seated, by etching through two or more etching apertures provided in the infrared radiation detecting structure.

A pyroelectric infrared radiation detector comprising:

• a substrate made of a (100) magnesium oxide single crystal material;
• an infrared radiation detecting structure comprising a first electrode disposed on the substrate, a pyroelectric thin film disposed on the first electrode, and a second electrode disposed on the pyroelectric thin film for absorption of infrared radiation;
• and
• said substrate having a recess provided in the upper surface thereof where the infrared radiation detecting structure is seated, a portion of the substrate being located in the recess as serving as a support for supporting the first and second electrodes and the pyroelectric thin film.