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US 5,470,761 AGranted
Process for fabricating a front surface resonant mesh array detector
AssigneeWestinghouse Electric Corp.
InventorsRichard C. McKee, Sandra L. Baumler
Life of this patent
Estimating the term…
Abstract
A process for fabricating a front surface resonant mesh array detector produces a detector of reduced size. The reduced size results in enhanced responsivity, and minimizes thermal stress between the detector and typical array substrates, enabling fabrication of arrays using front surface resonant mesh array detectors.
Claims15
A process for fabricating a front surface resonant mesh array detector, comprising the steps of:
- forming a photodetector film overlying a substrate;
- forming a dielectric film overlying said photodetector film;
- forming a reflective layer overlying said dielectric film;
- etching a plurality of parallel grooves in said reflective layer, said dielectric film, and in said photodetector film, each adjacent pair of said grooves defining one of a plurality of photodetector elements therebetween;
- removing a first portion of said reflective layer to provide a first electrical contact to said photodetector elements, and a second portion of said reflective layer to provide a second electrical contact to said photodetector elements;
- removing said substrate to expose one side of said photodetector film;
- and
- etching the exposed side of said photodetector film to a depth sufficient to electrically isolate each of said plurality of photodetector elements from one another.
5 more elements
Dependencies are inferred from the claim text.