Mixed gas supply system with a backup supply system

A system for supplying gas mixtures for the manufacture of semiconductors, which comprises:

• a) a first supply system, comprising:
• i) a plurality of flow control means for automatically feeding a plurality of gases separately from separate sources to a plurality of gas conduit means fluidly connected thereto;
• ii) a plurality of gas conduit means;
• iii) mixing means fluidly connected to said plurality of said gas conduit means for mixing the plurality of gases flowing from the plurality of said gas conduit means for preparing a gas mixture;
• and
• iv) buffer means for relieving the pressure energy of the gas mixture to, and in fluid connection with, a plurality of consumption means, at least one of which is a semiconductor manufacturing means;
• and
• b) a second, or backup, supply system in fluid connection with and juxtaposed proximally to said first system, said second, or backup, supply system also being in fluid connection with said plurality of consumption means.