Electrically blowable fuse structure manufacturing for organic insulators

A method of manufacturing a reliable fuse structure in contact with an organic insulator comprising the steps of:

• providing a substrate with a plurality of first conductors embedded in an insulator, said insulator including openings exposing portions of said first conductors,
• coating said substrate with a first layer of organic insulator,
• depositing a first layer of heat resistant material over said organic insulator,
• etching a plurality of apertures through said first layer of organic insulator and said first layer of heat resistant material to expose said contact areas,
• patterning a conducting layer to substantially fill said apertures with conducting material to form a plurality of second conductors,
• depositing a layer of fuse material over said second conductors and said first heat resistant layer,
• patterning said fuse layer to form a plurality of fuse elements each having first and second ends,
• depositing and patterning a plurality of third conductors so as to electrically contact said first and second ends of said fuse elements by a pair of said third conductors,
• patterning said first heat resistant layer to form a plurality of first heat resistant members by etching said layer using said third conductors and said fuse elements as a mask,
• depositing selectively a plurality of second heat resistant members over said fuse elements so as to substantially cover said fuse elements;
• and
• coating said substrate including said third conductors and said fuse structures with a second organic insulating layer.