Sealable transportable container having improved liner
AssigneeAsyst Technologies, Inc.
InventorsAnthony C. Bonora, Frederick T. Rosenquist, Sudhir Jain, Mark R. Davis
Life of this patent
Estimating the term…
Abstract
A transportable, sealable container, which has an improved pod liner. The container includes a box, a box door, and a gasket which forms a seal between the box and the box door. The box door has a conductive liner and a conductive path from the conductive liner to ground potential for electrostatic discharge protection. A membrane for isolating the gasket from the interior region of the container is bonded to the gasket and the conductive liner. The membrane may be impervious to gasses to prevent outgassing of the gasket or impervious to particles but not gasses to prevent particulate matter generated by the gasket from entering the interior region of the container.
Claims25
A sealable, transportable container for an article, comprising:
- a pod having an interior region and a sealing surface;
- a pod door having an interior surface and an exterior surface, said pod door including an electrical conductor extending from the interior surface to the exterior surface;
- an electrically conductive liner provided on said interior surface of said pod door adapted to remove electric charge from the article said liner connected to said conductor;
- a gasket provided on said pod door;
- a membrane overlying and attached to said electrically conductive liner and having an opening which exposes a portion of said conductive liner, a portion of said membrane overlying said gasket, said sealing surface of said pod adapted to mate with said portion of said membrane and compress said gasket to provide a seal;
- and
- a latch for securing said pod door to said pod.
A sealable, transportable container for holding a cassette, comprising
- a pod having an interior region and a sealing surface;
- a pod door having an interior surface;
- an electrically conductive liner provided on said interior surface of said pod door adapted to remove electric charge from the article;
- a gasket provided on said pod door;
- a membrane overlying and attached to said electrically conductive liner and having an opening which exposes a portion of said conductive liner, said membrane overlying said gasket said sealing surface of said pod adapted to mate with said portion of said membrane and compress said gasket to provide a seal;
- a latch for securing said pod door to said pod;
- and
- a cassette guide connected to said pod door and overlying said conductive liner.
A sealable, transportable container for receiving a cassette adapted to hold articles, comprising:
- a pod having an interior region for housing the cassette and a sealing surface;
- a pod door having an interior surface;
- an electrically conductive liner provided on said interior surface of said pod door, said conductive liner having a cassette receiving region, said liner removing electric charge from said cassette when said cassette is received by said cassette receiving region;
- a gasket overlying a portion of said interior surface of said pod door;
- a membrane overlying and attached to said electrically conductive liner and having an opening which exposes said cassette receiving region of said conductive liner, said membrane overlying said gasket so that when said pod door is moved in a sealing direction with respect to said pod, said sealing surface of said pod mates with a portion of said membrane overlying said gasket and comprises said gasket to provide a seal which isolates said interior region from ambient pressure conditions;
- a cassette guide overlying said cassette receiving portion of said conductive liner;
- means for connecting said cassette guide to said pod door;
- and
- a latch adapted to secure said pod door to said pod.
A standardized mechanical interface (SMIF) pod for an article, comprising:
- a box having an interior region and a first sealing surface;
- a box door having an interior surface and a second sealing surface, said box door adapted to mate with said box to form a seal between said first sealing surface and said second sealing surface isolating said interior region from ambient atmospheric conditions;
- an electrically conductive liner provided on said interior surface of said box door for supporting said article and for removing electric charge from said article when said liner is supporting said article;
- and
- a conductor in said box door adapted to electrically interconnect said conductive liner with a fixed potential external to said interior region of said pod.
A SMIF system for maintaining the cleanliness of an article to be processed, comprising:
- a container defining an interior space for containing the article, comprising:
- a box having first and second box top sealing surfaces,
- a box door having an interior surface and a box door sealing surface,
- an electrically conductive liner provided on said interior surface of said box door for removing electric charge from said article,
- a conductor in said box door adapted to electrically interconnect said conductive liner with a fixed potential external to said interior space of said container,
- a gasket provided on said box door sealing surface, and
- a membrane overlying and attached to said electrically conductive liner and having an opening which exposes said conductive liner, a portion of said membrane overlying said gasket, said portion of said membrane overlying said gasket adapted to mate with said first box top sealing surface and compress said gasket to provide a first seal which isolates said interior region from ambient conditions when said box door is moved in a sealing direction with respect to said box;
- and
- a port, comprising
- a port plate having first and second port plate sealing surfaces, said first port plate sealing surface sealably mating with the second box top sealing surface for making a second seal, and
- a port door having a first port door sealing surface for sealably mating with the second port plate sealing surface for making a third seal.
A standard mechanical interface (SMIF) pod for interfacing with a port, the port including a port plate and a port door, the port plate having a first port plate sealing surface and a second port plate sealing surface, the port door having a port door sealing surface, the first port plate sealing surface adapted to mate with the first port door sealing surface to form a seal between the port door and the port plate, said pod comprising:
- a box having first and second box top sealing surfaces, said first box top sealing surface adapted to mate with said second port plate sealing surface;
- a box door having a box door sealing surface, said box door sealing surface adapted to mate with said second box top sealing surface;
- an electrically conductive liner provided on said interior surface of said box door for removing electric charge from said article;
- and
- a conductor in said box door adapted to electrically interconnect said conductive liner with a fixed potential external to said box.
Dependencies are inferred from the claim text.