Drive control apparatus for microsensor
AssigneeRicoh Seiki Company, Ltd.
InventorJunji Manaka
Life of this patent
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Abstract
In the drive control apparatus for microsensor according to the present invention, power is constantly supplied to the microsensor. Also the peripheral humidity is detected, and control is switched between pulse drive control and constantly energized drive control according to the detected value. Also the pulse drive voltage is always supplied in an energized state.
Claims7
A drive control apparatus for a microsensor in which a plurality of cavity sections are provided on an airtight substrate at positions facing each other when said substrates are stacked via a junction area, and thin film heat generating bodies for temperature detection and temperature compensation are installed in a bridge form in each of the plurality of spaces each formed by said cavity sections, wherein a predetermined voltage is constantly supplied to the microsensor above a predetermined humidity.
A drive control apparatus for a microsensor in which a plurality of cavity sections are provided on an airtight substrate at positions facing to each other when said substrates are stacked via a junction area, and thin film heat generating bodies for temperature detection and temperature compensation are installed in a bridge form in each of the plurality of spaces each formed by said cavity sections, the drive control apparatus comprising:
- a detecting means for detecting the peripheral humidity;
- and
- a control means for selecting pulse voltage or constant voltage according to the peripheral humidity detected by said detecting means.
Dependencies are inferred from the claim text.