Chemical refill system for high purity chemicals

A chemical refill system for high purity chemicals comprising:

• a. a refillable ampule;
• b. a bulk container containing a high purity source chemical;
• c. a refill line interposed between and communicating with said ampule and said bulk container for transferring the high purity source chemical from said bulk container to said ampule;
• d. an inert gas pressure source communicating with the interior of said bulk container to transfer the high purity source chemical from said bulk container to said ampule through said refill line;
• e. a first metallic float sensor inside said ampule;
• f. a control unit electronically communicating with said metallic float;
• g. said first metallic float sensor having a full trigger point for detecting when the source chemical is at a full level in said ampule and a high--high trigger point for detecting when the source chemical is at a high--high level within said ampule, said high--high trigger point being higher in said ampule than said full trigger point;
• h. said control unit having an indicator that provides a signal to indicate that the high purity source chemical in said ampule is at said full level when the level of the high purity source chemical reaches said full trigger point of said first metallic float sensor;
• i. said control unit having an indicator that provides a signal to indicate that the high purity source chemical in said ampule is at said high--high level when the level of the high purity source chemical reaches said high--high trigger point of said first metallic float sensor should said full trigger point fail to provide a proper signal to said control unit;
• j. a first valve in said refill line in communication with and controlled by said control unit, and wherein:
• i. said control unit opens said first valve to allow the transfer of the high purity source chemical from said bulk container to said ampule;
• ii. said control unit transmits a signal to close said first valve when the level of source chemical in said ampule reaches said full trigger point of said first metallic float sensor;
• and
• iii. said control unit transmits a signal to close said first valve when the level of source chemical in said ampule reaches said high--high trigger point of said first metallic float sensor to terminate the transfer of the high purity source chemical should said first valve fail to close when the high purity source chemical reaches said full level in said ampule;
• k. a second valve in a pressurization line communicating with said ampule, said second valve communicating with and controlled by said control unit;
• and,
• l. a pressure sensor in said pressurization line, said pressure sensor communicating with said control unit;
• and wherein said control unit closes said second valve and opens said first valve when said pressure sensor detects a specified pressure in said ampule, thereby allowing the transfer of the source chemical from said bulk container to said ampule.