Jet plasma process and apparatus
AssigneeMinnesota Mining and Manufacturing Company
InventorsGunter A. Kohler, Seth M. Kirk, Gary J. Follett
Life of this patent
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Abstract
A process and apparatus for the plasma deposition of a carbon-rich coating onto a substrate is provided. This method includes the steps of: providing a substrate in a vacuum chamber; and generating a carbon-rich plasma in the vacuum chamber by injecting a plasma gas into a hollow cathode slot system containing a cathode made of two electrode plates arranged parallel to each other, providing a sufficient voltage to create and maintain a carbon-rich plasma in the hollow cathode slot system, and maintaining a vacuum in the vacuum chamber sufficient for maintaining the plasma. The plasma is deposited on the substrate to form a carbon-rich coating.
Claims30
A process for the plasma deposition of a carbon-rich coating onto a substrate comprising:
- (a) providing a substrate in a vacuum chamber;
- (b) generating a carbon-rich plasma in the vacuum chamber by:
- (1) injecting a plasma gas into a hollow cathode slot system containing a cathode comprising two electrode plates arranged parallel to each other;
- (2) providing a sufficient voltage to create and maintain a carbon-rich plasma in the hollow cathode slot system;
- and
- (3) maintaining a vacuum in the vacuum chamber sufficient for maintaining the plasma;
- and
- (c) depositing the carbon-rich plasma on the substrate to form a carbon-rich coating.
A jet plasma deposition apparatus comprising a cathode system for generating a plasma and an anode system;
- wherein said cathode system comprises a hollow cathode slot system containing a compartment having therein a cathode comprising two electrode plates arranged parallel to each other.
A jet plasma deposition apparatus comprising a cathode system for generating a plasma and an adjustable anode system located substantially below the path the plasma travels when in operation.
A jet plasma deposition apparatus comprising:
- (a) a hollow cathode slot system for generating a plasma comprising:
- (i) a first compartment having therein a hollow cathode tube;
- (ii) a second compartment connected to the first compartment;
- and
- (iii) a third compartment connected to the second compartment;
- wherein the third compartment has therein two electrode plates arranged parallel to each other;
- (b) an adjustable anode system located substantially below the path the plasma travels when in operation;
- and
- (c) a bias electrode.
Dependencies are inferred from the claim text.