Method for forming a thin film layer
AssigneeInternational Business Machines Corporation
InventorsThomas H. Baum, Shyama P. Mukherjee, Terrence R. O'Toole, Alice F. Tai, Alfred Viehbeck
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Abstract
A method for forming a thin film layer on a dielectric substrate. A nonconducting layer of material is blanket deposited on the dielectric substrate followed by a layer of polymeric dielectric material which is then patterned to partially expose the underlying layer of nonconducting material. The exposed underlying layer of material is contacted with a metallic salt solution. A key part of the present invention is the layer of nonconducting material which catalyzes the deposition of a seed layer from the metallic salt solution. Then, additional metallization may be easily electrolessly plated on the seed layer.
Claims11
A method for forming a thin film layer on an electronic substrate, the method comprising the steps of:
- (a) obtaining a dielectric substrate;
- (b) blanket depositing a nonconducting layer of material on the dielectric substrate;
- (c) blanket depositing a layer of polymeric dielectric material over the nonconducting layer of material;
- (d) patterning said polymeric material so as to form openings to partially expose the underlying layer of nonconducting material;
- (e) contacting said exposed underlying layer of nonconducting material with at least one of a palladium, platinum, silver, copper, nickel, or gold salt solution whereby palladium, platinum, copper, silver, nickel, or gold, respectively, is deposited as a seed layer;
- and
- (f) electrolessly plating at least one additional layer of metallization on said seed layer, and within the openings of said polymeric material, the electrolessly plated at least one additional layer of metallization, seed layer and polymeric material all forming at least a part of the final structure.
Dependencies are inferred from the claim text.