Process for forming a phosphor
AssigneeMinnesota Mining and Manufacturing Company
InventorsNang T. Tran, Kenneth R. Paulson, Bruce A. Sventek
Life of this patent
Estimating the term…
Abstract
The growth of a phosphor layer deposited on a patterned substrate containing a multiplicity of recessed ridges of triangular cross section can be controlled by tailoring the geometry of the recessed ridge structures. During the deposition process, little or no phosphor deposition occurs on the recessed ridge structures, and cracks are formed which separate the otherwise uniformly growing phosphor which is present in other regions of the patterned substrate where more substantial phosphor deposition occurs.
Claims24
A process for forming an X-ray radiation detector consisting essentially of the steps of:
- (a) providing a substrate for deposition and growth of an alkali halide phosphor,
- (b) forming a patterned surface on said substrate consisting essentially of a plurality of recessed ridges, each of said recessed ridges having a triangular cross-sectional shape, each recessed ridge being separated from one another by horizontal segments of said substrate and wherein:
- (i) the ratio of the height of each recessed ridge to the width of each horizontal segment of said substrate separating the recessed ridges is in the range of about 1:100 to 1:5;
- (ii) the ratio of the width of each recessed ridge to the width of each horizontal segment of said substrate separating the recessed ridges is in the range of about 1:50 to 1:5;
- and
- (c) depositing an alkali halide phosphor on the patterned surface of the substrate of step (b) having said recessed ridges, thereby forming cracks positioned over each of said recessed ridges.
Dependencies are inferred from the claim text.