Device for processing a measured signal corresponding to the intensity of X-rays reflected by a multi-layer structure on a substrate

Abstract

A device for processing a measured signal corresponding to the intensity reflected, as a function of the glancing angle (.theta.) at an X-ray wavelength (.lambda..sub.RX), by a real multi-layer structure stacked on a substrate (100), which layers exhibit small differences as regards refractive index at their interfaces, transforms the function (f(.theta.)), corresponding to the reflected intensity signal measured as a function of the glancing angle (.theta.) in a range of glancing angles which is bounded by minimum and maximum angular values .theta..sub.min -.theta..sub.max, into a function (F(d)) corresponding to the intensity signal formulated as a function of the depth (d) within the real multi-layer structure, the function (F(d)) obtained enabling a direct representation to be formed of the depth of each interface (d.sub.1, d.sub.2, . . . d.sub.n) of the real structure, and of the associated reflected intensities.

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