Scanning probe microscope apparatus for use in a scanning electron

A scanning probe microscope apparatus for use in combination with a scanning electron microscope, comprising:

• a specimen vacuum chamber for a scanning electron microscope, said specimen vacuum chamber having a cover plate for sealing said specimen vacuum chamber, said cover plate including a sealable opening;
• a scanning probe microscope having a probe for examining a specimen;
• a specimen stage for mounting said specimen for examination by said scanning probe microscope;
• means for scanning said probe relative to said specimen;
• first translating means for translating said specimen stage relative to said scanning probe microscope;
• a support frame mounted in said specimen vacuum chamber of said scanning electron microscope;
• second translating means for translating said scanning probe microscope relative to said scanning electron microscope, said scanning probe microscope being disposed on said second translating means;
• a mounting assembly disposed on said second translating means for mounting the scanning probe microscope at a selected angle with respect to the scanning electron microscope;
• a support frame secured to said cover plate of said specimen chamber;
• mass plate means for isolating said scanning probe microscope from external vibrations and supporting said second translating means;
• suspension means for suspending said mass plate means from said support frame;
• and
• vacuum load lock means disposed on said cover plate for moving said mounting assembly, said scanning probe microscope, said specimen, and said first translating means as a unit through said sealable opening of said cover plate between a first position disposed within said support frame and a second position disposed in said vacuum load lock means without breaking a vacuum in said specimen vacuum chamber.