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AssigneeSteag Microtech GmbH Sternenfels
InventorsEberhard Muhlfriedal, Armin Kubelbeck, Torsten Gerisch, Karl Appich, Jakob Szekeresch, Martin Kallis
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A device for coating a plate has an open channel being open in an upward direction and a device for supplying a liquid to the open channel. The liquid in the open channel forms an convexly curved portion projecting upwardly from the open channel. A device for transporting a plate at a close distance past the open channel is provided, with which a surface to be coated of the plate facing the convexly curved portion of the liquid is guided such that a thin film of the liquid is deposited on the surface to be coated by adhesion effects. Another device for lacquering or coating plates or disks has a capillary slot that is filled with a liquid coating medium. The plate to be coated is advanced across the capillary slot with the surface to be coated facing downwardly so that due to the capillary effect a thin layer is deposited on the surface of the plate.
A method for coating a series of plates substrates sequentially, said method comprising the steps of:
Dependencies are inferred from the claim text.