Radiation beam position and emission coordination system

A method of predeterminately operating on select portions of a substrate with radiation by effecting controlled relative coordination between a positional controller and emission from a beam generator with the aid of a digital computer, comprising:

• providing the digital computer a data base for use in effecting the controlled relative coordination, the data base including at least a first datum corresponding to beam generator repetition information;
• calculating in the computer a primary correlation integer datum and a secondary correlation integer datum;
• calculating in the computer a flag signal corresponding to a routine repetition datum related to the primary correlation integer datum and the first datum;
• selectively initiating the beam generator in substantial correspondence with a primary correlation integer datum multiple of the flag signal;
• and
• selectively initiating the positional control means in substantial correspondence with a secondary correlation integer datum multiple of the flag signal to result in a substantially coincident correspondence between initiation of the beam generating means and the positional control means.

A method of imposing a pattern on a target substrate through displacement of an intense radiation beam relative to the target substrate, comprising:

• directing toward the target substrate a radiation beam having an output intensity that varies in response to a control signal, the beam output intensity variation and control signal being in a synchronized relationship;
• relatively positioning the beam across the target substrate along first and second displacement segments by use of a servomechanism that effects the relative positioning in response to a position signal;
• and
• coordinating the control signal and the position signal so that the position signal causes the beam positioning and the control signal causes the beam output intensity to vary at accurately defined locations along the displacement segments so that, when the beam reaches the end of the first displacement segment, the control signal coincidently stops beam impact upon the target substrate, and when the beam begins along the second displacement segment, the control signal coincidently restores beam impact upon the target substrate.

Apparatus for imposing a pattern on a target substrate through relative displacement of an intense radiation beam and the target substrate, comprising:

• pulsed radiation means for providing the intense radiation beam having an output intensity that varies in response to a control signal, the beam output intensity and the control signal being in a synchronized relationship;
• movement means responsive to a position signal for relatively positioning the intense radiation beam to travel across the target substrate along a displacement path defined by first and second segments joined by an inflection point, the beam positioning and the position signal being in a synchronized relationship;
• and
• coordination means for coordinating the control and position signals so that the position signal causes the beam to travel and the control signal causes the beam output intensity to vary at accurately defined locations along the displacement path so that, when the radiation beam reaches the inflection point after traveling the first segment, the control signal coincidently reduces the output intensity of the beam, and when the beam begins to travel along the second segment, the control signal coincidently restores the output intensity of the beam at the inflection point.

Apparatus for selectively coordinating a beam position controller and emission from a beam generator to predeterminately operate on select portions of a substrate with radiation, comprising:

• a beam generator having an output beam with an intensity that varies in correspondence with a control signal, the beam intensity and the control signal being in a synchronized relationship;
• a beam position controller positioning the output beam along a displacement path defined by first and second segments joined by an inflection point in correspondence with a position signal, the beam positioning and the position signal being in a synchronized relationship;
• and
• coordination means for coordinating the control and position signals so that the position signal causes the beam positioning and the control signal causes the beam output intensity to vary at accurately defined locations along the displacement path so that, when the output beam reaches the inflection point after traveling at a substantially constant speed along the first segment, the control signal coincidently stops beam emission, and when the beam commences travel at the substantially constant speed along the second segment, the control signal coincidently restores beam emission at the inflection point.

A method of synchronizing a laser beam pulse emission with a laser movement along a travel path, comprising:

• receiving a desired laser beam pulse emission repetition frequency;
• calculating in a microprocessor first and second correlation integers related to the desired laser beam pulse emission frequency;
• calculating in the microprocessor an interrupt signal having a repetition frequency synchronously related to the first correlation integer;
• pulsing the laser beam in substantial coincidence with a first correlation integer frequency relationship of the interrupt signal;
• and
• moving the laser in substantial coincidence with a second correlation integer frequency relationship of the interrupt signal such that the laser beam pulse emission is coordinated with the laser movement to synchronize the laser beam emission with a known position along the travel path.