Two-stage actuator control device
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorMasaharu Ogawa
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Abstract
The two-stage actuator control device comprises a first actuator which can be driven in a small operating range and at high frequencies, a drive circuit for driving the first actuator, a second actuator which can be driven in a large operating range and at low frequencies, a drive circuit for driving the second actuator, a low pass filter for separating the operating regions of the two actuators, a position detector for detecting the relative position of the first actuator with respect to the second actuator, and a differentiator for differentiating the position signal of the position detector, in which the output of the differentiator is fed back to the input of the first actuator drive circuit 2. Thereby, the stability of the two-stage actuator control device is improved.
Claims8
A two-stage actuator control device comprising:
- a stabilizing compensator which generates an output signal;
- first actuator means for generating a first positioning signal, said first actuator means having an input and an output;
- means for generating a speed signal for said first actuator, said means for generating a speed signal having an input and an output, the input of said means for generating a speed signal being connected to the output of said first actuator means;
- second actuator means for generating a second positioning signal, said second actuator means having an input and an output, the output of said stabilizing compensator being connected to the input of said second actuator means said first actuator means being mounted on said second actuator means;
- logic means for subtracting the speed signal from the output signal from said stabilizing compensator, said logic means having an output connected to the input of said first actuator means.
A two-stage actuator control device comprising:
- a stabilizing compensator which generates an output signal;
- first actuator means for generating a first positioning signal, said first actuator means having an input and an output;
- means for generating a speed signal for said first actuator, said means for generating a speed signal having an input and an output, the input of said means for generating a speed signal being connected to the output of said first actuator means, the speed signal having a frequency substantially equal to the primary resonance frequency of said first actuator;
- second actuator means for generating a second positioning signal, said second actuator means having an input and an output, the output of said stabilizing compensator being connected to the input of said second actuator means said first actuator means being mounted on said second actuator means;
- logic means for subtracting the speed signal from the output signal from said stabilizing compensator, said logic means having an output connected to the input of said first actuator means;
- means for generating an error signal of an absolute position of said second actuator means;
- and
- means for subtracting the error signal from a target position signal to generate a control deviation signal for input to said stabilizing compensator.
Dependencies are inferred from the claim text.