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AssigneeMartin Marietta Energy Systems, Inc.
InventorsRodney A. McKee, Frederick J. Walker
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A process and structure wherein a film comprised of a perovskite or a spinel is built epitaxially upon a surface, such as an alkaline earth oxide surface, involves the epitaxial build up of alternating constituent metal oxide planes of the perovskite or spinel. The first layer of metal oxide built upon the surface includes a metal element which provides a small cation in the crystalline structure of the perovskite or spinel, and the second layer of metal oxide built upon the surface includes a metal element which provides a large cation in the crystalline structure of the perovskite or spinel. The layering sequence involved in the film build up reduces problems which would otherwise result from the interfacial electrostatics at the first atomic layers, and these oxides can be stabilized as commensurate thin films at a unit cell thickness or grown with high crystal quality to thicknesses of 0.5-0.7 .mu.m for optical device applications.
A process for coating a body with an epitaxial film wherein the body has a surface provided by an alkaline earth oxide, the process comprising the steps of:
A process for coating a body with an epitaxial film wherein the body has a surface defined by a metal oxide provided by either a Group IVA element oxide or an oxide constituent of a perovskite crystal or a spinel crystal wherein the metal element of the metal oxide provides a relatively small cation in the crystalline form of the metal oxide and the metal and oxygen atoms of the metal oxide are disposed at ordered sites across the oxide surface, the process comprising the steps of:
Dependencies are inferred from the claim text.